Tegal Corporation
Tegal Corporation company was founded in 1972 and is headquartered in Petaluma, California. Tegal Corporation (Tegal) designs, manufactures, markets and services plasma etch and deposition systems that enable the production of micro-electrical mechanical systems (MEMS), power integrated circuits (ICs) and optoelectronic devices found in products like smart phones, networking gear, solid-state lighting and digital imaging. The Company’s plasma etch and deposition tools enable manufacturing techniques, such as three dimensional (3-D) interconnect structures formed by intricate silicon etch, also known as Deep Reactive Ion Etching (DRIE). Etching and deposition constitute two of the principal device production process steps and each must be performed numerous times in the production of such devices. In May 2009, the Company established Tegal France, a wholly owned subsidiary. On September 16, 2008, the Company acquired certain assets from Alcatel Micro Machining Systems (AMMS) and Alcatel Lucent.
Contact Details
Office Address
Tegal Corporation
2201 S. McDowell Blvd.
Petaluma, CA, USA 94954
Phone: (707) 763-5600
Fax: (707) 765-9311
Executives
Chairman, Chief Exec. Officer and Pres.
Mr. Thomas R. Mika
Chief Financial Officer, Principal Accounting Officer, VP of Fin. & Admin., Sec. and Treasurer
Ms. Christine T. Hergenrother
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