Axcelis Technologies, Inc.

Axcelis Technologies, Inc.

Axcelis Technologies was founded in 1995 and is headquartered in Beverly, Massachusetts. Axcelis Technologies, Inc. (Axcelis) designs, manufactures and services ion implantation, dry strip and other processing equipment used in the fabrication of semiconductor chips. In addition to equipment, the Company provides aftermarket service and support, including spare parts, equipment upgrades, maintenance services and customer training. During the year ended December 31, 2008, the Company owned 50% of the equity of SEN Corporation (SEN), a producer of ion implantation equipment in Japan. SEN licenses technology from the Company for certain ion implantation products and has exclusive rights to market the licensed products in Japan. In February 2009, the Company entered into an agreement to sell its shares in SEN, which closed on March 30, 2009.

Contact Details

Office Address

Axcelis Technologies, Inc.
108 Cherry Hill Drive
Beverly, MA, USA 01915-1053
Phone: (978) 787-4000
Fax: (978) 787-3000

Executives

Chairman, Chief Exec. Officer and Pres.

Ms. Mary G. Puma

Chief Financial Officer

Mr. Stephen G. Bassett

Business Reviews for Axcelis Technologies, Inc.

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